JPH0369161B2 - - Google Patents
Info
- Publication number
- JPH0369161B2 JPH0369161B2 JP59077434A JP7743484A JPH0369161B2 JP H0369161 B2 JPH0369161 B2 JP H0369161B2 JP 59077434 A JP59077434 A JP 59077434A JP 7743484 A JP7743484 A JP 7743484A JP H0369161 B2 JPH0369161 B2 JP H0369161B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- stainless steel
- substrate
- silicon carbide
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 229910001256 stainless steel alloy Inorganic materials 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- 229910010271 silicon carbide Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Non-Adjustable Resistors (AREA)
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59077434A JPS60220902A (ja) | 1984-04-17 | 1984-04-17 | 感温素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59077434A JPS60220902A (ja) | 1984-04-17 | 1984-04-17 | 感温素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60220902A JPS60220902A (ja) | 1985-11-05 |
| JPH0369161B2 true JPH0369161B2 (en]) | 1991-10-31 |
Family
ID=13633902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59077434A Granted JPS60220902A (ja) | 1984-04-17 | 1984-04-17 | 感温素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60220902A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6388802A (ja) * | 1986-10-02 | 1988-04-19 | エヌオーケー株式会社 | 感温素子 |
| JPS63283002A (ja) * | 1987-05-14 | 1988-11-18 | Shinei Tsushin Kogyo Kk | ＳｉＣ感湿素材およびＳｉＣ感湿センサー |
-
1984
- 1984-04-17 JP JP59077434A patent/JPS60220902A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60220902A (ja) | 1985-11-05 |
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